Director: Sophie BRASSELET
Information & Photonics :
Electromagnetic Modeling :
Nanophotonics & components :
Optical thin film platform (photonic space)
Power photonic platform
Light scattering metrology platform
Optics for biomedical
Director: Bruno MASENELLI
Materials : heteroepitaxy, nanostructuration, nanostructures, multifunctional integration on Si, nanocharacterization.
Electronics : micro-nanoelectronics, circuit and systems conceptions on chip, TCAD, MEMS-NEMS…
Photonics and Photovoltaics : micro-nanophotonics, optoelectronics, M(N)OEMS…
Biotechnology and Health : nanobiotechnologies, micro-nano-biosystems, biomedical sensors, i-wear…
The NANO LYON technology centre based at INL allows its staff to create microelectronic and optoelectronics components for Microsystems and biochips.
Main equipment :
A white room equipped with electronic and optic lithography, material deposition, an ionic reactive engraving reactor and a platform for chemical micro-manufacturing.
Two epitaxy reactors by molecular projections for III-V and two plasma reactors for depositing dielectrics.
Characterization equipment (electric, optic, structural, surfaces).